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TESCAN LYRA3 FEG-SEM

Quorum SC7620 Sputter Coater

The Quorum SC7620 sputter coater is used to deposit thin conductive coatings onto specimens prior to SEM analysis, improving imaging quality and reducing surface charging.

Capabilities

  • Conductive metal coating for SEM sample preparation

  • Gold/palladium (Au/Pd) sputter coating

  • Thin coatings typically in the nanometre range

  • Adjustable coating time and plasma current

  • Argon-based sputtering

  • Glow-discharge surface treatment and cleaning

Equipment webpage: 

https://www.quorumtech.com/product-support/products-and-parts-supported

Related Publications

Yaebi's paper here

OXIMS Research Facility (2026) · Engineering and Technology Building (ETB), Room 00.12 · Department of Engineering Science, University of Oxford · Enquiries: