TESCAN LYRA3 FEG-SEM
Quorum SC7620 Sputter Coater
The Quorum SC7620 sputter coater is used to deposit thin conductive coatings onto specimens prior to SEM analysis, improving imaging quality and reducing surface charging.
Capabilities
Conductive metal coating for SEM sample preparation
Gold/palladium (Au/Pd) sputter coating
Thin coatings typically in the nanometre range
Adjustable coating time and plasma current
Argon-based sputtering
Glow-discharge surface treatment and cleaning
Equipment webpage:
https://www.quorumtech.com/product-support/products-and-parts-supported
Related Publications
Yaebi's paper here
OXIMS Research Facility (2026) ·
Engineering and Technology Building (ETB), Room 00.12 ·
Department of Engineering Science, University of Oxford ·
Enquiries: