TESCAN LYRA3 FEG-SEM

The TESCAN LYRA3 system is a dual-beam focused ion beam (FIB) and field-emission scanning electron microscope (FEG-SEM), providing high-resolution and nanoscale imaging for detailed microstructural characterisation, together with chemical, crystallographic and FIB analysis.

Capabilities:

• High-resolution secondary electron (SE) imaging, including nanoscale imaging

• Backscattered electron (BSE) imaging for compositional and phase contrast

• Energy-dispersive X-ray spectroscopy (EDS) for elemental analysis and mapping

• Electron backscatter diffraction (EBSD) for crystallographic orientation, phase identification and texture analysis

• Focused ion beam (FIB) milling and site-specific cross-section preparation

• Microstructural and fracture-surface characterisation

• Analysis of metals, alloys, ceramics, coatings and other engineering materials

Equipment webpage: 

https://tescan.com/product-portfolio/sem